Clean media compatibility
Deionised water and glycol blends demand tube and fittings that do not shed particulates or leach ions into the loop.
Industries / Semiconductor
Ultra-Clean Process Cooling Loops for Semiconductor Tools
Closed-loop distribution for process tools where particulate, ionic contamination and an unplanned leak all carry the same cost: a stopped fab.
Application requirements
What This Application Demands
The pipework is specified by the failure modes it has to prevent, not by a catalogue part number.
Joint integrity
Every welded or pressed joint is a potential particle trap and leak path. Joint method and internal bead profile are specified, not assumed.
Dimensional repeatability
Tool-bay skids must match interface drawings exactly so that replacement or expansion does not require field rework.
Traceable material
Heat numbers, chemical composition and mechanical values stay attached to each batch through fabrication and shipment.
Where our piping fits
Components We Build for This Application
Complete loops are engineered to your P&ID or CAD package; these are the building blocks we fabricate in-house.
Seamless 316L distribution headers
Multi-port manifolds with welded branch outlets, passivated after fabrication.
Made to drawing
Tool-side prefabricated spools
Cut, bent and formed to bay drawings with flanged or pressed ends.
Made to drawing
CDU interface blocks
Valve-integrated blocks matched to the tool's flow and isolation scheme.
Made to drawing
Typical configuration
Specified Per Project
The table below describes the parameters we normally agree at engineering review. Nothing here is a fixed catalogue SKU - final values follow your drawing, coolant and acceptance criteria.
NSF / WRAS material standards and DVGW W534 fitting tests describe materials and components; they are not semiconductor-process or system-level certifications.
| Material | AISI 304 / 316L seamless stainless tube, heat-number traceable |
|---|---|
| Joint method | Orbital / argon-shielded welding, or V / M-profile press fittings |
| Surface | Controlled internal roughness, cleaned and passivated for closed-loop service |
| Verification | 100% helium leak test + hydraulic pressure test on custom assemblies |
| Documentation | EN 10204 3.1 Mill Test Certificates, dimensional inspection record |
Delivery
From Drawing to a Tested Assembly
One engineering team owns the loop from manufacturability review through to the leak-test record.
- Send the drawingP&ID, isometric or CAD package with flow rates, coolant type and interface points.
- Engineering reviewMaterial compatibility, wall thickness, joint method and routing checked, with a manufacturability proposal returned.
- FabricationIn-house cutting, bending, welding, passivation and dimensional inspection under one roof in Foshan.
- VerificationHelium leak test, hydraulic pressure test and MTC documentation before export packing.
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Next step
Have a loop to build?
Send the drawing or a component list. Our engineers reply with manufacturability feedback, an indicative lead time and a quote.